Transversal ultrahigh-resolution polarizationsensitive optical coherence tomography for strain mapping in materials.


Optical coherence tomography (OCT) and its extension, polarization-sensitive (PS-)OCT, are techniques for contactless and nondestructive imaging of internal structures. In this work, we apply PS-OCT for material characterization. We use a transversal scanning, ultra-high resolution (UHR-)PS-OCT setup providing cross-sectional as well as inplane information about the internal microstructure, the birefringence and the orientation of the optical axis within the material. We perform structural analysis and strain-mapping for different samples: we show the necessity of UHR imaging for a highly strained elastomer sample, and we discuss the effect of large birefringence on the PS-OCT images. Furthermore, we investigate high-aspect ratio photoresist moulds for the production of microelectromechanical parts (MEMS), demonstrating that transversal UHR-PSOCT is a promising tool for non-destructive strain-mapping.


    0 Figures and Tables

      Download Full PDF Version (Non-Commercial Use)